Job Description

Job Title:

Senior Engineer Sustaining Process Engineering

Job Opportunity:Sr.Engineer,Sustaining Process Engineering

Location: Ansan, South Korea.
Division: Materials Solutions (MS)
Reports To: Director of Fab Technology and Engineering

Core Purpose of the Role

TheSustainingProcess Engineer will be a key member of the Hardware Sustaining team, responsible formaintainingstable performance of Atomic Layer Deposition (ALD) tools and associated process modulesthroughupkeep and improvement of Entegris precursor delivery cabinet product line This role focuses on cabinetreliability, process stability, troubleshooting, and continuous improvementtoenablehighvolumeproductionat our customers’ sites

The engineer will collaborate closely with equipment engineers, technicians, and manufacturing teams to ensureour precursor delivery cabinetproduct lineenablesALD hardware and process modulestooperateat top performance with minimal downtime.

Entegris isseekinga highly motivated, customer-centric GlobalSustainingProcessEngineer tosupportourdeployedPrecursor DeliverySystemsProduct Lineglobally This role is essential to ensuring safe, high-quality, andtimelyinstallations while driving strategic capacity-building initiatives to support our customers and expand our market presence.

Primary accountability is post-release sustaining of the installed base (process stability, reliability improvement, and standardization). This role does not own new process development, initial tool deployment/commissioning, or day-to-day field execution.

Key Responsibilities

1.Tool & Hardware Sustaining

• Serve assustainingtechnical owner for ALD hardware modules and chambers (thermal and plasmaenhanced).

• Work with our OEM/IDM partners to gain understanding oftool health, performance, stability, and hardware degradation trendsas they relate to our chemistry supply cabinets and use the gain knowledge to provide feedback for improvements.

• Identifyand resolve chronic tool issues, hardware failures, andlongtermreliability gaps.

• Define andoptimizepreventive maintenance (PM) procedureson our PDCsto improve uptime and chamber stability.

• Partner with Equipment Engineering to improve MTBF/MTTR and reduce unscheduled downtime.

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2.Process Stability & Control

• Providetool understandingtoimproveprocess performance across the installed base.

• Monitor SPC charts, alarms, excursion trends, andchambertochambermatchinglimitations

• Assess out-of-control or out-of-spec conditions by performing structured analysis and defining standardized recovery/prevention plans in collaboration with operations teams.

• Support recipe stabilization and standardized tuning guidance after hardware events(e.g., chamber clean, parts replacement, kit change).

3.Troubleshooting & Root Cause Analysis

• Lead root cause investigations for process drift, particle issues, metrology shifts, and equipment faults.

• Utilize structuredproblemsolvingmethods (5Why, Fishbone, DMAIC, 8D).

• Coordinatecrossfunctionalresponse plans and corrective actions aftertoolor process excursions.

• Coordinate with OEMs and internal stakeholders to review recurring issues, reliability trends, and corrective actions through established change-control and sustaining review processes.

4.Continuous Improvement

• Drive initiatives to improve tool availability, throughput, and cost-of-ownership.

• Optimizechamberpartslife, process chamber kits, and ALD module performance.

• Evaluate hardware changes, new components, or retrofit kits for performance improvement.

• Support hardware qualifications, engineering change orders (ECO), and configuration control.

5.Documentation & Communication

• Document chamber health parameters, troubleshooting procedures, and best-known methods (BKMs).

• Provide clear handoff updates to manufacturing, equipment teams, and shift engineering.

• Present findings, trends, and improvement opportunities tosustainingleadership.

Qualifications

Required

• Bachelor’s or Master’s in Materials Science, Chemical Engineering, Mechanical Engineering, Electrical Engineering, or relatedfield

• 5–7+years of hands-on experience with ALD orthinfilmdeposition systemsin a manufacturing environment.

• Strong understanding of vacuum systems, gas panels, valves, plasma systems, and hardware interactions.

• Proficiencywith SPC, data analysis, and troubleshooting of semiconductor process tools.

• Ability to manage priorities in afastpacedproduction setting.

• Ability to travel internationally up to50%.

• Englishproficiencyrequired

Preferred

• Experience in hardware sustaining, equipment reliability, or tool ownership roles.

• Familiarity with ALD platforms from ASM, Lam Research, TEL, Applied Materials,orsimilar.

• Understanding ofchamber matching, kit management, andprocessequipmentinteraction.

• Experience with JMP, Python, or other data analytics tools.

• Knowledge of contamination control and cleanroom operation.

Key Competencies

• Strong mechanical aptitude with process understanding

• Excellent troubleshooting androotcauseanalysis skills

• Clear communication andcrossfunctionalcollaboration

• Ownership mindset with a focus on reliability and uptime

• Ability to drive hardware and process improvements independently

Success Metrics

Success in this role is measured not only by project outcomes but also by how those outcomes are achieved. Key competencies include:

• Safety First: Promote andmaintaina safe work environment.

• TeamBuilding andCollaboration: Share knowledge and support team success.

• Accountability: Take ownership of tasks and deliver results.

• Customer Centricity: Prioritize customer needs and satisfaction.

• Adaptability: Thrive in a fast-paced, evolving environment.

• Communication: Effectivelyengageacross all levels of the organization and with customers.

Why Join Us?

• Be part of a global leader in advanced materials and delivery systems.

• Work on high-impact projects with cross-functional and international teams.

• Drive innovation and capacity growth in a critical industry sector.

• Enjoy competitive compensation, professional development, and global exposure.