Job Description

Job Title:

Engineer I, Sustaining Process Engineering

Job Opportunity:Engineer I, Sustaining Process Engineering

Location: Ansan, South Korea.
Division: Materials Solutions (MS)
Reports To: Director of Fab Technology and Engineering

Core Purpose of the Role

TheSustainingProcess Engineer will be a key member of the Hardware Sustaining team, responsible for maintaining stable performance of Atomic Layer Deposition (ALD) tools and associated process modulesthroughupkeep and improvement of Entegris precursor delivery cabinet product line This role focuses on cabinetreliability, process stability, troubleshooting, and continuous improvementtoenablehighvolume productionat ourcustomers sites

Theengineerwill collaborate closely with equipment engineers, technicians, and manufacturing teams to ensureour precursor delivery cabinetproduct lineenablesALD hardware and process modulestooperate at top performance with minimal downtime.

Entegris is seeking a highly motivated, customer-centric GlobalSustainingProcessEngineer tosupportourdeployedPrecursor DeliverySystemsProduct Lineglobally This role is essential to ensuring safe, high-quality, and timely installations while driving strategic capacity-building initiatives to support our customers and expand our market presence.

Key Responsibilities

1.Tool & Hardware Sustaining

• Serve as technical owner for ALD hardware modules and chambers (thermal and plasmaenhanced).

• Work with our OEM/IDM partners to gain understanding oftool health, chamber performance, recipe stability, and hardware degradation trends, and analyze pain points, and provide input for product improvements.

• Identify and resolve chronic tool issues, hardware failures, and longterm reliability gaps.

• Define and optimize preventive maintenance (PM) procedures to improve uptime and chamber stability.

• Partner with Equipment Engineering to improve MTBF/MTTR and reduce unscheduled downtime.

2.Process Stability & Control

• Provide tool understanding to improve process performanceacross the installed base of tools.

• Monitor SPC charts, alarms, excursion trends, and chambertochamber matching.

• React quickly to outof-control or outof-spec conditions, performing rapid troubleshooting and recovery.

• Supportrecipe tuning after hardware events (e.g., chamber clean, parts replacement, kit change).

3.Troubleshooting & Root Cause Analysis

• Lead root cause investigations for process drift, particle issues, metrology shifts, and equipment faults.

• Utilize structured problemsolving methods (5Why, Fishbone, DMAIC, 8D).

• Coordinate crossfunctional response plans and corrective actions after tool or process excursions.

• Work with OEMs to resolve persistent or complex hardware problems.

4.Continuous Improvement

• Supportinitiatives to improve tool availability, throughput, and cost-of-ownership.

• Support efforts to optimize chamber parts life, process chamber kits, and ALD module performance.

• Evaluate hardware changes, new components, or retrofit kits for performance improvement.

• Support hardware qualifications, engineering change orders (ECO), and configuration control.

5.Documentation & Communication

• Document chamber health parameters, troubleshooting procedures, and best-known methods (BKMs).

• Provide clear handoff updates to manufacturing, equipment teams, and shift engineering.

• Present findings, trends, and improvement opportunitiestothesustainingteamleadership.

Qualifications

Required

• Bachelor’s or Master’s in Materials Science, Chemical Engineering, Mechanical Engineering, Electrical Engineering, or related field.

• 2–5 years of hands-on experience with ALD or thinfilm deposition systemsin a manufacturing environment.

• Strong understanding of vacuum systems, gas panels, valves, plasma systems, and hardware interactions.

• Proficiency with SPC, data analysis, and troubleshooting of semiconductor process tools.

• Ability to manage priorities in a fastpaced production setting.

• Ability to travel internationally up to50%.

• English proficiency required.

Preferred

• Experience in hardware sustaining, equipment reliability, or tool ownership roles.

• Familiarity with ALD platforms from ASM, Lam Research, TEL, Applied Materials,orsimilar.

• Understanding of chamber matching, kit management, and processequipment interaction.

• Experience with JMP, Python, or other data analytics tools.

• Knowledge of contamination control and cleanroom operation.

Key Competencies

• Strong mechanical aptitude with process understanding

• Excellent troubleshooting and rootcause analysis skills

• Clear communication and crossfunctional collaboration

• Ownership mindset with a focus on reliability and uptime

• Ability to drive hardware and process improvements independently

Success Metrics

Success in this role is measured not only by project outcomes but also by how those outcomes are achieved. Key competencies include:

• Safety First: Promote and maintain a safe work environment.

• TeamBuilding andCollaboration: Share knowledge and support team success.

• Accountability: Take ownership of tasks and deliver results.

• Customer Centricity: Prioritize customer needs and satisfaction.

• Adaptability: Thrive in a fast-paced, evolving environment.

• Communication: Effectivelyengageacross all levels of the organization and with customers.

Why Join Us?

• Be part of a global leader in advanced materials and delivery systems.

• Work on high-impact projects with cross-functional and international teams.

• Drive innovation and capacity growth in a critical industry sector.

• Enjoy competitive compensation, professional development, and global exposure.