The EUV Power Technical Support Engineer is responsible for supporting and maintaining EUV source power performance, stability, and availability for EUV lithography systems in semiconductor manufacturing environments. The role provides advanced technical expertise to diagnose, analyze, and resolve EUV source power‑related issues to ensure system performance meets operational and manufacturing requirements.
This position works closely with customers, field service teams, and internal engineering organizations to investigate performance deviations, perform root cause analysis, and implement corrective and preventive actions. The role contributes to system uptime, productivity, and long‑term reliability through proactive monitoring, data analysis, and continuous improvement activities.
The EUV Power Technical Support Engineer operates in a technically complex, customer‑facing environment and plays a key role in maintaining stable EUV operations and supporting high‑volume manufacturing objectives.
The EUV Power Technical Support Engineer ensures optimal EUV performance, availability, and reliability in high‑volume semiconductor manufacturing environments. The role applies deep technical expertise to troubleshoot complex issues, optimize system performance, and act as a trusted technical partner to customers and internal stakeholders.
Monitor, analyze, and optimize EUV source power, stability, and availability to meet customer manufacturing requirements.
Diagnose performance degradations related to EUV source subsystems (laser, droplets, collector, vacuum, and diagnostics).
Perform advanced root cause analysis for EUV performance issues using system logs, sensor data, and trend analysis.
Lead technical investigations on recurring or high-impact performance issues and define corrective actions.
Provide on-site and remote technical support to resolve complex performance problems efficiently.
Act as a trusted technical advisor to customers on EUV source performance, limitations, and best operating practices.
Communicate technical findings, status updates, and improvement plans clearly to customer engineering and management teams.
Develop and implement preventive maintenance recommendations and performance optimization strategies.
Identify performance gaps and propose process improvements to enhance uptime and yield.
Document technical cases, lessons learned, and best practices to enhance organizational knowledge.
Contribute to technical guidelines, troubleshooting procedures, and training materials for field teams.
Support cross-site knowledge sharing to improve global EUV support capability.
Bachelor's degree or equivalent experience.
1-2+ years, technical knowledge of EUV Source & Drive Laser preferred.
Familiarity with EUV Dose Control, Source & CO2 performance preferred.
Skills
EUV Source & Power Systems Knowledge
Understanding of EUV source architecture, power generation, stability drivers, and degradation mechanisms.
Advanced Troubleshooting
Ability to diagnose complex EUV source power and performance issues using structured problem‑solving methods.
Root Cause Analysis (RCA)
Experience leading technical investigations and defining corrective and preventive actions.
Semiconductor Manufacturing Environment
Familiarity with fab operations, high‑volume manufacturing constraints, and uptime requirements.
Data Analysis & Interpretation
Ability to analyze system logs, sensor data, performance trends, and reliability metrics.
System Performance Optimization
Skills in identifying performance gaps and implementing optimization or preventive improvements.
Technical Documentation
Ability to document findings, procedures, and best practices clearly and accurately.
Support power performance escalation from ASML TN&KH site
Working model is 8 hours shift model, including day shift and night shift
This position requires access to controlled technology, as defined in the United States Export Administration Regulations (15 C.F.R. § 730, et seq.). Qualified candidates must be legally authorized to access such controlled technology prior to beginning work. Business demands may require ASML to proceed with candidates who are immediately eligible to access controlled technology.
ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that inclusion and diversity is a driving force in the success of our company.
Need to know more about applying for a job at ASML? Read our frequently asked questions
Who are we?
ASML is an innovation leader in the global semiconductor industry. We make machines that chipmakers use to mass produce microchips. Founded in 1984 in the Netherlands with just a handful of employees, we’ve now grown to over 40,000 employees, 143 nationalities and more than 60 locations around the world.
What do we do?
We provide chipmakers with hardware, software and services to mass produce patterns on silicon through lithography. Our lithography systems use ultraviolet light to create billions of tiny structures on silicon that together make up a microchip. We push our technology to new limits to enable our customers to create smaller, faster and more powerful chips.
Who are our people?
While you may think that only engineers and mathematicians work at ASML, you'll be surprised to find out that our people come from a wide variety of backgrounds. Across ASML, we have dedicated teams that manage customer support, communications and media, IT, software development and more. Every team in the company is essential for pushing our technology and the industry forward.
If you love to tackle challenges and innovate in a collaborative, supportive and inclusive environment with all the flexibility and freedom to unleash your full potential, ASML is the place to be.
Join us!
